Capabilities

Multi purpose wafer level tester.

Description

Fully automated wafer level deep submicron reliability evaluation station,with capabilities to perform parallel testing.

Features

Sequential-parallel test architecture, up to 8 SMUs or Voltage Sources supported over one system, enabling parallel testing or up to 8 DUTs or more at the same time.

Full integration with industry's latest model semi-auto and automatic probe stations.

Allows separate test program definition per site, sub-site and wafer.